DC-704 Diffusion Pump Fluid與BRB Pump fluid 74之物性比較表
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DC-704
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BRB-74
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Ultimate Vacuum極限真空度(torr)
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Untrapped
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10 ̄⁷~10 ̄⁸
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10 ̄⁶~10 ̄⁸
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trapped
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10 ̄₁₁
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10 ̄₁₀~10 ̄₁₁
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Extrapolated Vapor Pressure(蒸氣壓), torr, 25°C (77°F)
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2 X 10 ̄⁸
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2 X 10 ̄⁸
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Specific Gravity(比重) at 25°C (77°F)
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1,07
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1,07
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Viscosity (動黏度)at 25°C (77°F), cSt
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39
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39
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Flash Point(引火點), open cup, °C (°F)
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221 (430)
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221 (430)
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Boiling Poin(沸點)t, at 0.5 torr, °C (°F)
( 0.5 torr=0.6666 hpa)
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215 (0.5 torr)
322°C(1013 hpa)
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>200°C(0.5 torr)
> 300°C(1013 hpa)
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Typical Boiler Temperature(典型爐內溫度), °C (°F)
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220 (428)
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220 (428)
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Surface Tension(表面張力), dynes/cm
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37.3
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37.1~37.3
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Heat of Vaporization(熱蒸發溫度), kcal/g mole
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25.5 /200°C (392°F)
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25.4~25.6 /200°C (392°F)
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Molecular Description(分子組成)
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Tetramethyltetra-
phenyltrisiloxane
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Tetramethyltetra-
phenyltrisiloxane
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Molecular Weight(分子量)
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484
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484
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Vapor Pressure Equation(氣壓方程式)
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A = 11.025
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A = 11.025
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log10 P = A - B/T
(P = vapor pressure, torr; T = absolute temperature, °K)
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B = 5570
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B = 5570
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